Technological advances in micro and submicro photofabrication imagery : [seminar], August 21-23, 1974, San Diego, California

Author(s)

• Graf, J. M.
• Converse, William

Bibliographic Information

Technological advances in micro and submicro photofabrication imagery : [seminar], August 21-23, 1974, San Diego, California

editors, J. M. Graf, William Converse

（Proceedings of the Society of Photo-Optical Instrumentation Engineers, v. 55）

Society of Photo-optical Instrumentation Engineers, c1975

Note

Page 136 blank for "Notes."

Includes bibliographical references

Details

• NCID: BA23910460
• LCCN: 76357435
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Palos Verdes Estates, Calif.
• Pages/Volumes: viii, 136 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC : 621.381/7
• Subject Headings:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Masks (Electronics) -- Congresses
• Parent Bibliography ID:
  • BA0118856X