Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California

著者

• Ruddell, Richard L.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California

Richard L. Ruddell ... [et al.] editors ; presented by the Society of Photo-optical Instrumentation Engineers

（Proceedings of the Society of Photo-Optical Instrumentation Engineers, v. 135）

The Society, c1978

• pbk.

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA23920985
• ISBN:
  • 0892521627
• LCCN: 80120065
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: vi, 170 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.381/74
• 件名:
  • LCSH : Semiconductors -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0118856X