Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California

Author(s)

• Ruddell, Richard L.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Developments in semiconductor microlithography III : April 10-11, 1978, San Jose, California

Richard L. Ruddell ... [et al.] editors ; presented by the Society of Photo-optical Instrumentation Engineers

（Proceedings of the Society of Photo-Optical Instrumentation Engineers, v. 135）

The Society, c1978

• pbk.

Note

Includes bibliographical references and indexes

Details

• NCID: BA23920985
• ISBN:
  • 0892521627
• LCCN: 80120065
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vi, 170 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.381/74
• Subject Headings:
  • LCSH : Semiconductors -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0118856X