Optical characterization techniques for semiconductor technology : April 1-2, 1981, San Jose, California

書誌事項

Optical characterization techniques for semiconductor technology : April 1-2, 1981, San Jose, California

D.E. Aspnes, S. So, R.F. Potter, editors

(Proceedings of the Society of Photo-Optical Instrumentation Engineers, v. 276)

S.P.I.E.-- Society of Photo-optical Instrumentation Engineers, 1981

  • pbk.

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注記

Includes bibliographical references and indexes

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