Applications of optical metrology : techniques and measurements II : [proceedings] : April 7-8, 1983, Arlington, Virginia
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Applications of optical metrology : techniques and measurements II : [proceedings] : April 7-8, 1983, Arlington, Virginia
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 416）
S.P.I.E.-- International Society for Optical Engineering, c1983
- pbk.
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Includes bibliographical references and index