Precision surface metrology : August 23-24, 1983, San Diego, California

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Precision surface metrology : August 23-24, 1983, San Diego, California

chairman/editor: James C. Wyant

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 429)

S.P.I.E.-- International Society for Optical Engineering, c1983

  • pbk.

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Includes bibliographies and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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