X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York

著者

• Wilson, Alan D.
• Brookhaven National Laboratory. National Synchrotron Light Source
• Society of Photo-optical Instrumentation Engineers

書誌事項

X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York

Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 448）

S.P.I.E.-- International Society for Optical Engineering, 1984

• pbk.

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA23963864
• ISBN:
  • 0892524839
• LCCN: 83051563
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 140 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7836
  • DC19 : 621.3815/2
• 件名:
  • LCSH : X-ray lithography -- Congresses
  • LCSH : X-rays -- Industrial applications -- Congresses
• 親書誌ID:
  • BA0022700X