X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York

Author(s)

• Wilson, Alan D.
• Brookhaven National Laboratory. National Synchrotron Light Source
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

X-ray lithography and applications of soft x-rays to technology : October 19-20, 1983, Upton, New York

Alan D. Wilson, chairman/editor ; cosponsors, National Synchrotron Light Source/Brookhaven National Laboratory, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 448）

S.P.I.E.-- International Society for Optical Engineering, 1984

• pbk.

Note

Includes bibliographies and index

Details

• NCID: BA23963864
• ISBN:
  • 0892524839
• LCCN: 83051563
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 140 p.
• Size: 28 cm
• Classification:
  • LCC : TK7836
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : X-ray lithography -- Congresses
  • LCSH : X-rays -- Industrial applications -- Congresses
• Parent Bibliography ID:
  • BA0022700X