Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California
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Bibliographic Information
Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 334）
SPIE--the International Society for Optical Engineering, c1982
- pbk.
Available at 5 libraries
Note
"In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society."
Includes bibliographical references and indexes