Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California

Author(s)

• Stover, Harry L.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California

Harry L. Stover, chairman/editor

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 334）

SPIE--the International Society for Optical Engineering, c1982

• pbk.

Note

"In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society."

Includes bibliographical references and indexes

Details

• NCID: BA23966181
• ISBN:
  • 0892523697
• LCCN: 82060282
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: viii, 265 p.
• Size: 28 cm
• Classification:
  • LCC : TR940
  • DC19 : 621.381/74
• Subject Headings:
  • LCSH : Microlithography -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Congresses
• Parent Bibliography ID:
  • BA0022700X