Advances in resist technology : March 12-13, 1984, Santa Clara, California

Author(s)

• Willson, C. G. (C. Grant)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Advances in resist technology : March 12-13, 1984, Santa Clara, California

chairman/editor: C. Grant Willson

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 469）

S.P.I.E.-- International Society for Optical Engineering, c1984

• pbk.

Note

Includes bibliographies and index

Details

• NCID: BA23969995
• ISBN:
  • 0892525045
• LCCN: 84050823
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 195 p.
• Size: 28 cm
• Classification:
  • LCC : TR940
  • DC19 : 686.2/325
• Subject Headings:
  • LCSH : Photoresists -- Congresses
• Parent Bibliography ID:
  • BA0022700X