Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California
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Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1742）
SPIE, c1993
- : pbk
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Includes bibliographical references and index
