Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts

Bibliographic Information

Spectroscopic characterization techniques for semiconductor technology : 9-10 November 1983, Cambridge, Massachusetts

Fred H. Pollak, Robert S. Bauer, chairmen/editors

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 452)

SPIE -- the International Society for Optical Engineering, c1984

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

Details

  • NCID
    BA23978941
  • ISBN
    • 0892524871
  • LCCN
    83051560
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Bellingham, Wash.
  • Pages/Volumes
    vi, 203 p.
  • Size
    28 cm
  • Parent Bibliography ID
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