Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California

著者

• Stover, Harry L.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Optical microlithography III : technology for the next decade : March 14-15, 1984, Santa Clara, California

chairman/editor: Harry L. Stover

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 470）

S.P.I.E.-- International Society for Optical Engineering, c1984

• pbk.

タイトル別名

Optical microlithography 3

Optical microlithography three

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA23981560
• ISBN:
  • 0892525053
• LCCN: 84050822
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 269 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TR940
  • DC19 : 621.381/74
• 件名:
  • LCSH : Microlithography -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Congresses
• 親書誌ID:
  • BA0022700X