Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia

著者

• Nyyssonen, Diana
• United States. National Bureau of Standards

書誌事項

Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia

Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 480）

SPIE--the International Society for Optical Engineering, c1984

• pbk.

タイトル別名

Integrated circuit metrology 2

Integrated circuit metrology two

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA23986305
• ISBN:
  • 0892525150
• LCCN: 84051334
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 172 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/73
• 件名:
  • LCSH : Integrated circuits -- Congresses
  • LCSH : Mensuration -- Congresses
• 親書誌ID:
  • BA0022700X