Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia

Author(s)

• Nyyssonen, Diana
• United States. National Bureau of Standards

Bibliographic Information

Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia

Diana Nyyssonen, chairman/editor ; cooperating organization, National Bureau of Standards

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 480）

SPIE--the International Society for Optical Engineering, c1984

• pbk.

Other Title

Integrated circuit metrology 2

Integrated circuit metrology two

Note

Includes bibliographical references and index

Details

• NCID: BA23986305
• ISBN:
  • 0892525150
• LCCN: 84051334
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 172 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Congresses
  • LCSH : Mensuration -- Congresses
• Parent Bibliography ID:
  • BA0022700X