Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California

著者

• Pollak, Fred H.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California

Fred H. Pollak, chairman/editor

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 524）

SPIE -- the International Society for Optical Engineering, c1985

• NII書誌ID(NCID): BA23996422
• ISBN:
  • 0892525592
• LCCN: 85050424
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: vi, 169 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X