Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California

Bibliographic Information

Spectroscopic characterization techniques for semiconductor technology II : January 21-22, 1985, Los Angeles, California

Fred H. Pollak, chairman/editor

(Proceedings / SPIE -- the International Society for Optical Engineering, v. 524)

SPIE -- the International Society for Optical Engineering, c1985

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

Details

  • NCID
    BA23996422
  • ISBN
    • 0892525592
  • LCCN
    85050424
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Bellingham, Wash.
  • Pages/Volumes
    vi, 169 p.
  • Size
    28 cm
  • Parent Bibliography ID
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