ALE-3 : proceedings of the Third International Symposium on Atomic Layer Epitaxy and Related Surface Processes, Sendai, Japan, 25-27 May, 1994
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ALE-3 : proceedings of the Third International Symposium on Atomic Layer Epitaxy and Related Surface Processes, Sendai, Japan, 25-27 May, 1994
North-Holland , Elsevier ; 1994
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Includes bibliographical references and indexes
Reprinted from: Applied surface science v.82/83 (1994)