Optical microlithography IV : March 13-14, 1985, Santa Clara, California

Author(s)

• Stover, Harry L.
• International Society for Hybrid Microelectronics
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Optical microlithography IV : March 13-14, 1985, Santa Clara, California

Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 538）

SPIE--the International Society for Optical Engineering, c1985

• spine : pbk.
• pbk.

Other Title

Optical microlithography 4

Optical microlithography four

Note

Includes bibliographies

Details

• NCID: BA2399852X
• ISBN:
  • 0892525738
• LCCN: 85061232
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 260 p.
• Size: 28 cm
• Classification:
  • LCC : TR940
  • DC19 : 621.381/74
• Subject Headings:
  • LCSH : Microlithography -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Congresses
• Parent Bibliography ID:
  • BA0022700X