Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California
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Advances in resist technology and processing II : March 11-12, 1985, Santa Clara, California
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 539)
SPIE--the International Society for Optical Engineering, c1985
- pbk.
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Includes bibliographies and index