Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.

著者

• Murarka, S. P.

書誌事項

Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.

editors, S.P. Murarka ... [et al.]

（Materials Research Society symposium proceedings, v. 337）

Materials Research Society, c1994

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA24003630
• ISBN:
  • 1558992375
• LCCN: 94005418
• 出版国コード: us
• タイトル言語コード: eng
• 出版地: Pittsburgh, Pa.
• ページ数/冊数: xiv, 768 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Design and construction -- Congresses
  • LCSH : Metallizing -- Congresses
  • LCSH : Metallic films -- congresses
• 親書誌ID:
  • BA00013775