Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California

Author(s)

• Monahan, Kevin M.
• University of Arizona. Optical Sciences Center
• University of Rochester. Institute of Optics
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California

Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 565）

SPIE--International Society for Optical Engineering, 1985

• pbk.

Note

Includes bibliographies

Details

• NCID: BA24008190
• ISBN:
  • 0892526009
• LCCN: 85062883
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 223 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Measurement -- Congresses
  • LCSH : Integrated circuits -- Testing -- Congresses
• Parent Bibliography ID:
  • BA0022700X