The chemistry of metal CVD

Author(s)

• Kodas, Toivo T. (Toivo Tarmo)
• Hampden-Smith, Mark J.

Bibliographic Information

The chemistry of metal CVD

edited by Toivo T. Kodas and Mark J. Hampden-Smith

VCH, c1994

Note

Includes bibliographical references

Details

• NCID: BA24145974
• ISBN:
  • 3527290710
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim ; Tokyo
• Pages/Volumes: xxiv, 530 p.
• Size: 25 cm
• Classification:
  • LCC : TK7867
  • DC20 : 621.3815/2
• Subject Headings:
  • LCSH : Electronic circuits -- Design and construction
  • LCSH : Chemical vapor deposition
  • LCSH : Metallic films