Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.

書誌事項

Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A.

editors, Jimmie J. Wortman ... [et al.]

(Materials Research Society symposium proceedings, v. 342)

Materials Research Society, c1994

タイトル別名

Rapid thermal and integrated processing 3

Rapid thermal and integrated processing three

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注記

Includes bibliographical references and indexes

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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