Semiconductor sensors

著者

• Sze, S. M.

書誌事項

Semiconductor sensors

edited by S.M. Sze

（A Wiley-Interscience publication）

J. Wiley, c1994

注記

Includes bibliographical references and index

内容説明・目次

内容説明

An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.

目次

Classification and Terminology of Sensors (S. Sze). Semiconductor Sensor Technologies (C. Mastrangelo & W. Tang). Acoustic Sensors (M. Motamedi & R. White). Mechanical Sensors (B. Kloeck & N. de Rooij). Magnetic Sensors (H. Baltes & R. Castagnetti). Radiation Sensors (S. Audet & J. Steigerwald). Thermal Sensors (S. Van Herwaarden & G. Meijer). Chemical Sensors (S. Morrison). Biosensors (A. Dewa & W. Ko). Integrated Sensors (K. Najafi, et al.). Appendices. Index.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA24398142
• ISBN:
  • 0471546097
• LCCN: 94022271
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York
• ページ数/冊数: xii, 550 p.
• 大きさ: 25 cm
• 分類:
  • LCC : TA165
  • DC20 : 681/.2
• 件名:
  • LCSH : Detectors
  • LCSH : Semiconductors
• 親書誌ID:
  • BA00493885