Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California
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書誌事項
Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 1186)
SPIE, c1990
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注記
Includes bibliographical references and index