Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California

Author(s)

• Brillson, L. J.
• Pollak, Fred H.
• Society of Photo-optical Instrumentation Engineers
• North Carolina State University. Center for Advanced Electronic Materials Processing

Bibliographic Information

Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California

Leonard J. Brillson, Fred H. Pollak, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1186）

SPIE, c1990

Note

Includes bibliographical references and index

Details

• NCID: BA24466479
• ISBN:
  • 0819402222
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vi, 201 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X