Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California

著者

• Brillson, L. J.
• Pollak, Fred H.
• Society of Photo-optical Instrumentation Engineers
• North Carolina State University. Center for Advanced Electronic Materials Processing

書誌事項

Surface and interface analysis of microelectronic materials processing and growth, 12-13 October 1989, Santa Clara, California

Leonard J. Brillson, Fred H. Pollak, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1186）

SPIE, c1990

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA24466479
• ISBN:
  • 0819402222
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: vi, 201 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X