Processing of films for high Tc superconducting electronics : 10-12 October 1989, Santa Clara, California

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Processing of films for high Tc superconducting electronics : 10-12 October 1989, Santa Clara, California

T. Venkatesan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH

（Proceedings / SPIE -- the International Society for Optical Engineering, v.1187）

SPIE, c1990

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注記

On t.p. "c" is subscript

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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