Processing of films for high Tc superconducting electronics : 10-12 October 1989, Santa Clara, California

著者

• Venkatesan, T.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Processing of films for high Tc superconducting electronics : 10-12 October 1989, Santa Clara, California

T. Venkatesan, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH

（Proceedings / SPIE -- the International Society for Optical Engineering, v.1187）

SPIE, c1990

注記

On t.p. "c" is subscript

Includes bibliographical references and index

• NII書誌ID(NCID): BA2446664X
• ISBN:
  • 0819402230
• LCCN: 89043523
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: viii, 367 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7872.T55
  • DC20 : 621.381/52
• 件名:
  • LCSH : Thin film devices -- Congresses
  • LCSH : High temperature superconductors -- Congresses
• 親書誌ID:
  • BA0022700X