Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California

Author(s)

• Freund, Robert S.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California

Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1188）

The Society, c1990

Note

Includes bibliographical references and index

Details

• NCID: BA24466719
• ISBN:
  • 0819402249
• LCCN: 89043524
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 196 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871
  • DC20 : 621.381
• Subject Headings:
  • LCSH : Electronics -- Materials -- Congresses
  • LCSH : Integrated circuits -- Very large scale integration -- Design and construction -- Congresses
  • LCSH : Semiconductors -- Congresses
• Parent Bibliography ID:
  • BA0022700X