Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

著者

• Narayan, J. (Jaydish)
• Society of Photo-optical Instrumentation Engineers

書誌事項

Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

J. Narayan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMATECH [and] Center for Advanced Electronic Materials Processing, North Carolina State University [and] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1190）

SPIE, c1990

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA24466898
• ISBN:
  • 0819402265
• LCCN: 89043526
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 221 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductor industry -- Laser use in -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Semiconductors -- Etching -- Congresses
  • LCSH : Annealing of crystals -- Congresses
• 親書誌ID:
  • BA0022700X