Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

Author(s)

• Narayan, J. (Jaydish)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California

J. Narayan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMATECH [and] Center for Advanced Electronic Materials Processing, North Carolina State University [and] Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1190）

SPIE, c1990

Note

Includes bibliographical references and index

• NCID: BA24466898
• ISBN:
  • 0819402265
• LCCN: 89043526
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 221 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• Subject Headings:
  • LCSH : Semiconductor industry -- Laser use in -- Congresses
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Semiconductors -- Etching -- Congresses
  • LCSH : Annealing of crystals -- Congresses
• Parent Bibliography ID:
  • BA0022700X