Laser and ion beam modification of materials : proceedings of the Symposium U: Material Synthesis and Modification by Ion Beams and Laser Beams of the 3rd IUMRS International Conference on Advanced Materials, Sunshine City, Ikebukuro, Tokyo, Japan, August 31-September 4, 1993
著者
書誌事項
Laser and ion beam modification of materials : proceedings of the Symposium U: Material Synthesis and Modification by Ion Beams and Laser Beams of the 3rd IUMRS International Conference on Advanced Materials, Sunshine City, Ikebukuro, Tokyo, Japan, August 31-September 4, 1993
（Transactions of the Materials Research Society of Japan, vol. 17 . Advances materials ; '93 ; 4）
Elsevier, 1994
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注記
Includes bibliographical references and indexes
内容説明・目次
内容説明
These proceedings cover symposium U of the 3rd IUMRS International Conference in Tokyo. Covering materials synthesis and modification by ion beams and/or laser beams, topics discussed include: ionized cluter beams; laser processes; and thin film deposition by ion beams.
目次
- Symposium U - materials synthesis and modification by ion beams and/or laser beams: plenary talks
- prospects for ion/laser cluster beams
- large scale ion beam systems
- ionized cluster beams
- ion and laser processing for industrial applications
- thin film deposition by ion beams I
- large scale laser systems
- laser processes I
- thin film deposition by ion beams II
- laser processes II
- laser processes III
- ion implantation I
- ion implantation II
- ion beam mixing and sputtering
- ion implantation into metals, insulators and organic materials
- ion implantation into semiconductors
- ion beam material processing
- ion beam material processing II.
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