Computational modeling in semiconductor processing

Author(s)

• Meyyappan, M.

Bibliographic Information

Computational modeling in semiconductor processing

M. Meyyappan, editor

（The Artech House materials science library）

Artech House, c1995

Note

Includes bibliographical references and index

Details

• NCID: BA24671751
• ISBN:
  • 0890067074
• LCCN: 94017563
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: x, 363 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.3815/2/0113
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction -- Data processing
  • LCSH : Process control -- Mathematical models
  • LCSH : Semiconductor industry
• Parent Bibliography ID:
  • BA04825670