IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '94 proceedings, November 14-16, 1994, Cambridge, Massachusetts
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書誌事項
IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC '94 proceedings, November 14-16, 1994, Cambridge, Massachusetts
Additional copies of these proceedings may be purchased from: SEMI, c1994
- : soft.
- : case.
- : micro.
- タイトル別名
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94CH3475-1
大学図書館所蔵 全4件
注記
Includes bibliographical references
"IEEE catalog number 94CH3475-1"--T.p. verso
"Theme - Manufacturing Excellence : A Global Challenge"