Ion implantation : basics to device fabrication

Author(s)

• Rimini, E.

Bibliographic Information

Ion implantation : basics to device fabrication

by Emanuele Rimini

（The Kluwer international series in engineering and computer science, SECS 293 . Electronic materials : science and technology）

Kluwer Academic Publishers, c1995

Note

Bibliography: p. [359]-378

Includes index

Details

• NCID: BA24882495
• ISBN:
  • 0792395204
• LCCN: 94034251
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: xii, 393 p.
• Size: 25 cm
• Classification:
  • LCC : QC702.7.I55
  • DC20 : 621.3815/2
• Subject Headings:
  • LCSH : Ion implantation
  • LCSH : Semiconductor doping
  • LCSH : Semiconductors -- Design and construction
• Parent Bibliography ID:
  • BA0004729X