Photon-assisted processing of surfaces and thin films : proceedings of Symposium B on Photon-assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference, Strasbourg, France, May 24-27, 1994
著者
書誌事項
Photon-assisted processing of surfaces and thin films : proceedings of Symposium B on Photon-assisted Processing of Surfaces and Thin Films of the 1994 E-MRS Spring Conference, Strasbourg, France, May 24-27, 1994
（European Materials Research Society symposia proceedings）
North-Holland/Elsevier, 1995
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
The aim of the Symposium on Photon-Assisted Processing of Surfaces and Thin Films was to give particularly European scientists, studying effects of photons - produced by laers and lamps - on deposition, etching and modification of surfaces and thin films, the opportunity to report and discuss recent achievements.
目次
- Part 1 Laser ablation: process characterization
- thin film deposition and characterization
- techniques and applications. Part 2 Photon-induced surface modification: using lamps
- using lasers. Part 3 Photo-chemical deposition: using lamps
- using lasers. Part 4 Laser-chemical etching. Part 5 Laser-based thin film diagnostics.
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