Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.

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Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.

editors, Bernard M. Gallois, Woo Y. Lee, Michael A. Pickering

(Materials Research Society symposium proceedings, v. 363)

Materials Research Society, c1995

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Includes bibliographical references and index

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