Optical/laser microlithography III : 7-9 March 1990, San Jose, California

著者

• Pol, Victor
• Society of Photo-optical Instrumentation Engineers

書誌事項

Optical/laser microlithography III : 7-9 March 1990, San Jose, California

Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1264）

SPIE, c1990

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA25246682
• ISBN:
  • 0819403113
• LCCN: 90060894
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: x, 586 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TA1677
  • DC20 : 621.36/6
• 件名:
  • LCSH : Lasers -- Industrial applications -- Congresses
  • LCSH : Optical instruments -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X