Metallization : theory and practice for VLSI and ULSI

Author(s)

• Murarka, S. P.

Bibliographic Information

Metallization : theory and practice for VLSI and ULSI

Shyam P. Murarka

Butterworth-Heinemann, c1993

Note

Includes bibliographical references and index

Details

• NCID: BA25302207
• ISBN:
  • 0750690011
• LCCN: 92033603
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston
• Pages/Volumes: vi, 250 p.
• Size: 26 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.39/5
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Metallizing