Proceedings of the Second International Symposium on Electrochemical Microfabrication

著者

• International Symposium on Electrochemical Microfabrication
• Datta, Madhav
• Sheppard, Keith
• Dukovic, John O.
• Electrochemical Society. Electrodeposition Division

書誌事項

Proceedings of the Second International Symposium on Electrochemical Microfabrication

editors, Madhav Datta, Keith Sheppard, John O. Dukovic

（Proceedings / [Electrochemical Society], v. 94-32）

Electrochemical Society, c1995

タイトル別名

Electrochemical microfabrication

注記

"Electrodeposition Division."

The symposium was held Oct. 10-12, 1994, in Miami Beach, Fla

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA25354368
• ISBN:
  • 1566770912
• LCCN: 94061181
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: ix, 412 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Microelectronics -- Congresses
  • LCSH : Electrochemistry, Industrial -- Congresses
  • LCSH : Masks (Electronics) -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
  • LCSH : Silicon -- Congresses
• 親書誌ID:
  • BA01323290