Excimer laser materials processing and beam delivery systems : 8-9 November 1990, Boston, Massachusetts

Author(s)

Bibliographic Information

Excimer laser materials processing and beam delivery systems : 8-9 November 1990, Boston, Massachusetts

Bernhard P. Piwczyk, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1377）

SPIE, c1991

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Note

Includes bibliographical references and index

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    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

Details

  • NCID
    BA2576959X
  • ISBN
    • 0819404446
  • LCCN
    90064010
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Bellingham, Wash., USA
  • Pages/Volumes
    vii, 135 p.
  • Size
    28 cm
  • Classification
  • Subject Headings
  • Parent Bibliography ID
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