Selected papers on optical microlithography

Author(s)

• Stover, Harry L.

Bibliographic Information

Selected papers on optical microlithography

Harry L. Stover, editor

（SPIE milestone series / Brian J. Thompson, general editor, v. MS 55）

SPIE Optical Engineering Press, c1992

• : hardbound
• : softbound

Other Title

Optical microlithography

Note

Papers originally published in various journals, 1974-1991

Includes bibliographical references and index

Details

• NCID: BA25780639
• ISBN:
  • 0819409855
  • 0819409863
• LCCN: 92019421
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xviii, 676 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction
  • LCSH : Microlithography
  • LCSH : Masks (Electronics)
• Parent Bibliography ID:
  • BA10810973