Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California

Author(s)

• Bondur, James
• Turner, Terry R.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California

James Bondur, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1392）

SPIE, c1991

Note

Includes bibliographical references and indexes

Details

• NCID: BA25824701
• ISBN:
  • 0819404616
• LCCN: 90050808
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: x, 690 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/5
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X