Rapid thermal and related processing techniques : 2-3 October 1990, Santa Clara, California

著者

• Singh, Rajendra
• Moslehi, Mehrdad M.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Rapid thermal and related processing techniques : 2-3 October 1990, Santa Clara, California

Rajendra Singh, Mehrdad M. Moslehi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1393）

SPIE, c1991

注記

Papers presented at the SPIE Conference on Rapid Thermal and Related Processing Techniques

Includes bibliographical references and index

• NII書誌ID(NCID): BA25824971
• ISBN:
  • 0819404624
• LCCN: 90050809
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 422 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.381/52
• 件名:
  • LCSH : Semiconductors -- Heat treatment -- Congresses
  • LCSH : Semiconductor doping -- Congresses
  • LCSH : Vapor plating -- Congresses
• 親書誌ID:
  • BA0022700X