Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California

Author(s)

• Gordon, Colin G.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California

Colin G. Gordon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1619）

SPIE, c1992

Note

Includes bibliographical references and index

Details

• NCID: BA25850734
• ISBN:
  • 0819407577
• LCCN: 92080102
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 369 p.
• Size: 28 cm
• Classification:
  • LCC : QC370.5
  • DC20 : 621.381
• Subject Headings:
  • LCSH : Optical instruments -- Vibration -- Congresses
  • LCSH : Vibration -- Measurement -- Congresses
• Parent Bibliography ID:
  • BA0022700X