Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California

著者

• Gordon, Colin G.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Vibration control in microelectronics, optics, and metrology : 4-6 November 1991, San Jose, California

Colin G. Gordon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1619）

SPIE, c1992

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA25850734
• ISBN:
  • 0819407577
• LCCN: 92080102
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 369 p.
• 大きさ: 28 cm
• 分類:
  • LCC : QC370.5
  • DC20 : 621.381
• 件名:
  • LCSH : Optical instruments -- Vibration -- Congresses
  • LCSH : Vibration -- Measurement -- Congresses
• 親書誌ID:
  • BA0022700X