Ion implantation technology-94 : proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13-17, 1994
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Ion implantation technology-94 : proceedings of the Tenth International Conference on Ion Implantation Technology, Catania, Italy, June 13-17, 1994
North-Holland, 1995
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Nuclear instruments and methods in physics research, section B: beam interactions with materials and atoms, vol.B96, 1-2, pt.1(pp.1-440) reprinted from