Metal-semiconductor interfaces
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Metal-semiconductor interfaces
Ohmsha, c1995
- Ohmsha
- IOS
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Description
This volume presents a collection of papers written by authors who were members of a project on "Metal-Semiconductor Interfaces", sponsored by the Ministry of Education, Science and Culture of Japan (MON-BUSHO). Almost one billion metal-semiconductor interfaces or contacts may be found in a silicon chip whose size is less than one square centimetre. Consequently, there has been a great deal of research into metal-semiconductor interfaces, especially since the 1980s. The "Metal-Semiconductor Interfaces" project was composed of 4 research branches to tackle the following subjects that are covered in this book: theoretical approaches; initial stage of metal-semiconductor interface formation; interface structure of metal-semiconductor systems; realization and control of contact characterization; and novel characterization techniques of buried interfaces.
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